JPH0238464U - - Google Patents
Info
- Publication number
- JPH0238464U JPH0238464U JP11473488U JP11473488U JPH0238464U JP H0238464 U JPH0238464 U JP H0238464U JP 11473488 U JP11473488 U JP 11473488U JP 11473488 U JP11473488 U JP 11473488U JP H0238464 U JPH0238464 U JP H0238464U
- Authority
- JP
- Japan
- Prior art keywords
- permanent magnet
- temperature
- magnetron sputtering
- view
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000696 magnetic material Substances 0.000 claims description 7
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11473488U JPH0238464U (en]) | 1988-08-30 | 1988-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11473488U JPH0238464U (en]) | 1988-08-30 | 1988-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238464U true JPH0238464U (en]) | 1990-03-14 |
Family
ID=31355755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11473488U Pending JPH0238464U (en]) | 1988-08-30 | 1988-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238464U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019140820A (ja) * | 2018-02-13 | 2019-08-22 | トヨタ自動車株式会社 | モータ |
-
1988
- 1988-08-30 JP JP11473488U patent/JPH0238464U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019140820A (ja) * | 2018-02-13 | 2019-08-22 | トヨタ自動車株式会社 | モータ |
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